PV-100 桌上型SEM
ModuleSci的SEM掃描式電子顯微鏡相較以前大型機台，更符合現在科技的趨勢，輕巧的桌上型且快速的掃描過程，加上無雜訊又清晰的影像，為先進技術的開發和利用提供卓越的成果。
| • Sample exchange time within 60s |
| • Magnification 20 x to 300,000 x |
| • Cost effective compared to others |
| • Motorized 5-axis X(, Y, Z, R, T) stage |
| • Available simple and fast installation |
| • SE (PV-100) |
| • SE & EDS (PV-100⁺) |
| • SE & BSE (PV-150) |
| • SE, BSE&EDS (PV-150⁺) |
| Dimension(mm) |
420 x 630 x 680 (W x L x H)
|
| Electron source | Tungsten filament |
| Resolution | 5.0 nm |
| Magnification | 20 x ~ 300,000 x |
| Effective magnification | ~ 70,000 x |
| Electron gun vacuum | 10⁻⁶ torr |
| Accelerating voltage | 1 ~ 30 kV |
| Motorized Stage | Chamber type (X,Y,Z,R,T) 50,50,30mm, 360°, -10°~90° |
| Vacuum system | Rotary pump, TMP |
