Scanning Kelvin probe 掃瞄式功函數量測
Ambient Advanced Scanning Kelvin Probe for work function measurment Model: SKP series
Ambient Advanced Scanning Kelvin Probe
- 3D maps of surface potential and sample topography.
- Scan area: 50 x 50 mm (最大可到 350 x 350 mm, for 12" wafer)
- 2mm and 50µm tips. (有其它尺寸或可客制)
- Work Function resolution 1-3 meV (2mm tip), 5-10 meV (50µm)
- Tip to Sample Height Regulation to within 400 nm.