SR 系列 反射式膜厚儀
|
Model |
Wavelength Range * |
Measurable Parameters** |
Measurable Thickness Range*** |
Options |
|
SR100 |
250 to 1100 nm |
D / R / N / K |
Up to 50 um |
T, Mapping |
|
SR300 |
400 to 1100 nm |
D / R / N / K |
20 nm to 150 um |
T, Mapping |
|
SR400 |
1000 to 1700 nm |
D / R / N / K |
50 nm to 100 um |
T, Mapping |
|
SR450 |
400 to 1700 nm |
D / R / N / K |
20 nm to 150 um |
T, Mapping |
|
SR500 |
250 to 1700 nm |
D / R / N / K |
Up to 150 um |
T, Mapping |
* Wavelength range can be customized as low as 190 nm and/or as long as 2500 nm, or with different resolutions.
** D - Thickness; R - Reflection Spectrum; T - Transmission Spectrum; N - Refractive Index; K - Extinction Coefficients
*** Measurable thickness range is also film properties dependent.
Thickness range for each model could also be configured with different wavelength resolutions
Typical Applications
- Solar Films (Si3N4, CdTe, CdS, ZnS, SnOx)...
- Semiconductor Films
- Biological Films
- Photoresist, polyimide, Oxides, Nitrides
- Optical coatings, TiO2, SiO2, Ta2O5…..
- Semiconductor Compounds
- Functional films in MEMS/MOEMS
- Thin film transistors (TFT) stack
- Conductive oxide: Indium Tin Oxide
- Coatings on medical devices
- Amorphous, Nano and Crystalline films
- Cell Gap